Specification
| SS-300 SERIES | ||
|---|---|---|
| MODELTYPE | SS-300-SA | SS-300-DA |
| Ⅰ. Major Features | ||
| 1Detector | SE | SE+BSE |
| 2Stage System (Storke) | X,Y(50㎜), R(360˚), Z (0~60㎜), Tilt(-20~90˚) 5-axis Manual |
X,Y(50㎜), R(360˚), Z (0~60㎜), Tilt(-20~90˚) 5-axis Motorized |
| 3Resolution | 3nm | |
| 4Accelerating Voltage | 0.5~30kV | |
| 5Magnifications | 10x~300,000x | |
| 6Maximum Sample Size | 140㎜(D) x 60㎜(H) | |
| Ⅱ. Electron Optics | ||
| 1Electron Gun | Tungsten(W) Filament | |
| 2Aperture(O.L) | Variable Type (30/50/50/100㎛) | |
| 3Beam Shift | X.Y 100㎛ (±50) | |
| Ⅲ. Image System | ||
| 1Image Diplay | 22inch LCD | |
| 2Image Fomat | BMP,JPEG,PNG,TIFF | |
| 3OS | Windows10 | |
| 4Scan Mode | 320×240,640×480,1280×960,2560×1280,5120×3840 | |
| 5Automation Function | Auto Focus, Contrast&Brightness, Stigmator, Gun Align(by gou align coil) | |
| Ⅴ. Vacuum | ||
| 1Vacuum mode | High Vacuum | High+Low Vacuum |
| 2Pump System | Initial Vacuum : Rotary(100L), High Vacuum : Turbo Molecular(80L) / Full Automation |
|
| Ⅵ. Dimensions | ||
| 1SEM | 746(W)x696(D)x1411㎜, 250kg | |
| 2Rotary Pump | 400(W)x160(D)x340(H)㎜, 24kg | |
| Ⅶ. Additional | ||
| 1SEM | CCD CAMERA(Navigation mode), Chamber CAMERA, Analysis Joystick Controller | |
| 2Option | EDS, WDS, EBSD, CL(Cathodoluminescent) Image, Cooling Stage, STEM Detector |

