Specification
| MODEL | IM-10 SERIES |
|---|---|
| Ⅰ. Major Features | |
| 1Detector | BSE |
| 2Stage System (Storke) | X,Y(40㎜) 2-axis Motorized |
| 3Resolution | 40nm |
| 4Accelerating Voltage | 10~30kV |
| 5Magnifications | 50x~30,000x |
| 6Maximum Sample Size | 50㎜(D) x 40㎜(H) |
| Ⅱ. Electron Optics | |
| 1Electron Gun | Tungsten(W) Filament |
| 2Aperture(O.L) | Single Type |
| 3Beam Shift | X.Y 100㎛ (±50) |
| Ⅲ. Image System | |
| 1Image Diplay | 22inch LCD |
| 2Image Fomat | BMP,JPEG,PNG,TIFF |
| 3OS | Windows10 |
| 4Scan Mode | 320×240,640×480,1280×960,2560×1280 |
| 5Automation Function | Auto Focus, Contrast&Brightness, Stigmator, Gun Align(by gou align coil) |
| Ⅴ. Vacuum | |
| 1Vacuum mode | Low Vacuum |
| 2Pump System | Initial Vacuum : Rotary(100L), High Vacuum : Turbo Molecular(80L) / Full Automation |
| Ⅵ. Dimensions | |
| 1SEM | 480(W)x480(D)x1180㎜, 90kg |
| 2Rotary Pump | 400(W)x160(D)x340(H)㎜, 24kg |
| Ⅶ. Additional | |
| 1SEM | CCD CAMERA, Analysis Joystick Controller |
| 2Option | EDS, Cooling Stage |

